A magnetically controlled chemical-mechanical polishing (MC-CMP) approach for fabricating channel-cut silicon crystal optics for the High Energy Photon Source
- 聯(lián)系作者:
- 刊物名稱:JOURNAL OF SYNCHROTRON RADIATION
- 所屬學(xué)科:
- 作者:Hong, Z; Diao, QS; Xu, W et al.
- 發(fā)表年度:2023
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